4

Transmission and side-lobe effect in attenuated phase shift masks

Year:
1995
Language:
english
File:
PDF, 1.19 MB
english, 1995
5

FIB repair of defects in rim and attenuated phase shift masks

Year:
1995
Language:
english
File:
PDF, 1.47 MB
english, 1995
7

Optimization of FIB methods for phase shift mask defect repair

Year:
1996
Language:
english
File:
PDF, 2.05 MB
english, 1996
8

Ions from liquid gold

Year:
1983
Language:
english
File:
PDF, 2.81 MB
english, 1983
10

Focusing waveguide grating coupler using a diffractive doublet

Year:
1997
Language:
english
File:
PDF, 269 KB
english, 1997
22

Special issue on Nano Lithography 2013

Year:
2014
Language:
english
File:
PDF, 163 KB
english, 2014
39

Liquid-like behaviour of gold nanowire bridges

Year:
2017
Language:
english
File:
PDF, 624 KB
english, 2017